Article ID
96BEN41005
Title
Quantitative SIMS Analysis of Mo in Ti-Dilute Mo Alloys Using
Isotopic Abundance
“¯ˆÊ‘Ì•ª—£–@‚É‚æ‚éTi-Šó”–Mo‡‹à’†‚ÌMo‚ÌSIMS’è—Ê•ªÍ
Author(s)
Yuichiro Sudo
Hiroyuki T. Takeshita
Ryosuke O.
Suzuki
Yoichi Tomii
Katsutoshi
Ono
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Publication/Publisher
J. Japan Inst. Metals, Vol. 60, No.4, pp. 406-411,
1996.
“ú–{‹à‘®Šw‰ïŽ, ‘æ60Šª ‘æ4†, 406-411•Å, 1996”N
Abstract
For the application of SIMS (Secondary Ion Mass Spectrometry)
to quantitative analysis for the dilute element in metallic alloys, it is
indispensable to eliminate the disturbance which is counted with the secondary
ions of the dilute element. Ti _{2}^{+} ions from the Ti matrix overlap the Mo
^{+} ions from the Ti-dilute Mo alloys However, a conventional SIMS could not be
applied to separate Ti _{2}^{+} ions either by its high resolution mass analysis
or by the separation based on the energy profiles. Since the secondary ion
intensities of Mo ^{+} and Ti _{2}^{+} are proportional to their isotopic
abundances, the secondary ion intensity of Mo ^{+} can be calculated and
separated from the measured intensity. Using the ion intensity of ^{92} Mo ^{+}
or ^{100} Mo ^{+} after the disturbance elimination and the normalization, a
good linear relationship for the quantitative Mo analysis was obtained in the
range of 766 mass ppm to 2.31 mass% Mo. The lower quantitative limit is
evaluated to be 80 mass ppm due to the improved preciseness.