Article ID

96BEN41005

Title

Quantitative SIMS Analysis of Mo in Ti-Dilute Mo Alloys Using Isotopic Abundance

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Author(s)

Yuichiro Sudo
Hiroyuki T. Takeshita
Ryosuke O. Suzuki
Yoichi Tomii
Katsutoshi Ono

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Publication/Publisher

J. Japan Inst. Metals, Vol. 60, No.4, pp. 406-411, 1996.

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Abstract

For the application of SIMS (Secondary Ion Mass Spectrometry) to quantitative analysis for the dilute element in metallic alloys, it is indispensable to eliminate the disturbance which is counted with the secondary ions of the dilute element. Ti _{2}^{+} ions from the Ti matrix overlap the Mo ^{+} ions from the Ti-dilute Mo alloys However, a conventional SIMS could not be applied to separate Ti _{2}^{+} ions either by its high resolution mass analysis or by the separation based on the energy profiles. Since the secondary ion intensities of Mo ^{+} and Ti _{2}^{+} are proportional to their isotopic abundances, the secondary ion intensity of Mo ^{+} can be calculated and separated from the measured intensity. Using the ion intensity of ^{92} Mo ^{+} or ^{100} Mo ^{+} after the disturbance elimination and the normalization, a good linear relationship for the quantitative Mo analysis was obtained in the range of 766 mass ppm to 2.31 mass% Mo. The lower quantitative limit is evaluated to be 80 mass ppm due to the improved preciseness.