TitleLocal Quantitative SIMS Analysis of Small Amount of Oxygen in
Author(s)Hiroyuki T. Takeshita
Publication/PublisherJ. Jpn. Inst. Metals, Vol.59, No.9, (1995) pp.
日本金属学会誌 第59巻 第9号 (1995) pp. 973-977.
AbstractLocal quantitative analysis of small amount of oxygen in
titanium was studied using the secondary ion mass spectrometry (SIMS). Cs+ ion
was used for the primary ion beam, and 16O-, 64TiO- and 96Ti2- for the secondary
ones. The intensity profiles of the secondary ions against energy at sputtering
(energy profile) showed a good similarity between the cluster ions, i.e., TiO-
and Ti2-. The precision of oxygen analysis was improved due to the similar
energy profiles of the two analytical ions. Using the high energy resolution of
mass spectrometer and the stable extraction voltage of secondary ions, the
effect by mismatching in the energy profiles was reduced. The relative standard
deviation of the ion intensity ratio I[64TiO-]/I[96Ti2-] was suppressed less
than 10% over the oxygen concentration of 23 to 1540 mass ppm.